Regulations last checked for updates: Jun 15, 2025

Title 40 - Protection of Environment last revised: Nov 15, 2025
All TitlesTitle 40Chapter IPart 98Subpart IAppendix - Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O
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Appendix - Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O

Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O,j) for N2O Utilization (UN2O,j)

Manufacturing type/process type/wafer size N2O
Semiconductor Manufacturing:
200 mm or Less:
CVD 1-Ui1.0
Other Manufacturing Process 1-Ui1.0
300 mm or greater:
CVD 1-Ui0.5
Other Manufacturing Process 1-Ui1.0
LCD Manufacturing:
CVD Thin Film Manufacturing 1-Ui0.63
All other N2O Processes1.0
[89 FR 31921, Apr. 25, 2024]
authority: 42 U.S.C. 7401-7671q.
source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.
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