Regulations last checked for updates: Jun 15, 2025

Title 40 - Protection of Environment last revised: Nov 15, 2025
All TitlesTitle 40Chapter IPart 98Subpart IAppendix - Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing
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Appendix - Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Manufacturing type/process type/gas Default DRE
(%)
MEMS, LCDs, and PV Manufacturing60
Semiconductor Manufacturing:
CF487
CH3F98
CHF397
CH2F298
C4F893
C4F8O93
C5F897
C4F695
C3F898
C2HF597
C2F698
SF695
NF396
All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing60
N2O Processes
CVD and all other N2O-using processes60
[89 FR 31922, Apr. 25, 2024]
authority: 42 U.S.C. 7401-7671q.
source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.
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