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Regulations last checked for updates: May 18, 2024
Title 40 - Protection of Environment last revised: May 16, 2024
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Title 40
Chapter I
Part 98
Subpart I
Appendix - Table I-15 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS Manufacturing for Use With the Stack Test Method
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Appendix - Table I-15 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS Manufacturing for Use With the Stack Test Method
[78 FR 68233, Nov. 13, 2013]
authority:
42 U.S.C. 7401-7671q.
source:
74 FR 56374, Oct. 30, 2009, unless otherwise noted.
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