Code of Federal Regulations > Title 40 > Chapter I > Part 98 > Subpart I > Appendix - Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)

Regulations last checked for updates: May 18, 2024

Title 40 - Protection of Environment last revised: May 16, 2024

Appendix - Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)

Link to an amendment published at 89 FR 31922, Apr. 25, 2024.

[78 FR 68230, Nov. 13, 2013]

authority: 42 U.S.C. 7401-7671q.

source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.