Code of Federal Regulations > Title 40 > Chapter I > Part 98 > Subpart I > Appendix - Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method

Regulations last checked for updates: Jun 15, 2025

Title 40 - Protection of Environment last revised: Nov 15, 2025

Appendix - Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method

Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method

[300 mm and 450 mm Wafers]

All processes	Process gas i
All processes	CF4	C2F6	CHF3	CH2F2	CH3F	C3F8	C3F8 Remote	C4F8	NF3	NF3 Remote	SF6	C4F6	C5F8	C4F8O
1-Ui	0.65	0.80	0.37	0.20	0.30	0.30	0.063	0.183	0.19	0.018	0.30	0.15	0.100	NA
BCF4	NA	0.21	0.076	0.060	0.029	0.21	NA	0.045	0.040	0.037	0.033	0.059	0.109	NA
BC2F6	0.058	NA	0.058	0.043	0.0093	0.18	NA	0.027	0.0204	NA	0.041	0.062	0.083	NA
BC4F6	0.0083	NA	0.01219	NA	0.001	NA	NA	0.008	NA	NA	NA	NA	NA	NA
BC4F8	0.0046	NA	0.00272	0.054	0.007	NA	NA	NA	NA	NA	NA	0.0051	NA	NA
BC3F8	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	0.00012	NA
BCH2F2	0.005	NA	0.0024	NA	0.0033	NA	NA	0.0021	0.00034	0.00088	0.000020	0.000030	NA	NA
BCH3F	0.0061	NA	0.027	0.0036	NA	0.0007	NA	0.0063	0.0036	0.0028	0.0082	0.00065	NA	NA
BCHF3	0.012	NA	NA	0.057	0.016	0.012	NA	0.028	0.0106	0.000059	0.0039	0.017	0.0069	NA
BF2	NA	NA	NA	NA	NA	NA	NA	NA	NA	0.50	NA	NA	NA	NA

[89 FR 31922, Apr. 25, 2024]

authority: 42 U.S.C. 7401-7671q.

source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.