Regulations last checked for updates: May 18, 2024

Title 40 - Protection of Environment last revised: May 16, 2024
Appendix - Table I-1 to Subpart I of Part 98—Default Emission Factors for Threshold Applicability Determination
Link to an amendment published at 89 FR 31919, Apr. 25, 2024.
Product type Emission factors EFi
CF4 C2F6 CHF3 C3F8 NF3 SF6
Semiconductors (kg/m 2)0.901.000.040.050.040.20
LCD (g/m 2)0.50NANANA0.904.00
MEMS (kg/m 2)NANANANANA1.02

Notes: NA denotes not applicable based on currently available information.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68221, Nov. 13, 2013]
source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.