CLA-2-84:OT:RR:NC:N1:104
Edward Juliano, Jr.
Edward F. Juliano, Jr. - Attorney at Law
303 Wyman Street, Suite 300
Waltham, MA 02451
RE: The tariff classification of a semiconductor photolithography wafer stage module from the Netherlands
Dear Mr. Juliano:
In your letter dated July 23, 2026, you requested a tariff classification ruling on behalf your client, ASML
US, LLC.
The product in question is the Wafer Stage Module type NXE MK 1 (Wafer Stage), a unit of the ASML NXE
Extreme Ultraviolet (EUV) semiconductor photolithography system. The Wafer Stage is a machine or
apparatus that positions a silicon wafer during metrology and exposure (printing circuit patterns onto the
wafer). It is comprised of a large rectangular box-like structure containing a magnetic levitation base to
suspend and propel two integral wafer tables (aka chucks or wafer chucks) without physical contact. One
wafer table holds and positions a silicon wafer under a metrology unit which measures and aligns the wafer
for exposure; the other wafer table is positioned under the EUV light source unit; neither the metrology unit
nor the light source unit are a part of the Wafer Stage and neither are imported with the Wafer Stage Module.
The applicable subheading for the Wafer Stage Module type NXE MK 1 will be 8486.40.0030, Harmonized
Tariff Schedule of the United States (HTSUS), which provides for Machines and apparatus of a kind used
solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices,
electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11(C) to this
chapter; for lifting, handling, loading or unloading of boules, wafers, semiconductor devices, electronic
integrated circuits and flat panel displays. The general rate of duty will be free.
The duties cited above are current as of this ruling’s issuance. Duty rates are provided for your convenience
and are subject to change. The text of the most recent HTSUS and the accompanying duty rates are provided
at https://hts.usitc.gov/.
This ruling does not address the applicability of any additional duties, taxes, fees, exactions and/or other
charges, which may apply to the goods discussed herein. This includes, but is not limited to, tariffs and other
duties as provided for in Subchapter III to Chapter 99, HTSUS. Thus, for example, in addition to the
classification stated above, the merchandise covered by this ruling may also need to be reported with either
the Chapter 99 provision under which an additional tariff applies or one of the Chapter 99 provisions
covering exceptions to such tariffs.
For further information to assist with the importation process, please refer to the frequently updated Cargo
Systems Messaging Service (CSMS) messages at
https://www.cbp.gov/trade/automated/cargo-systems-messaging-service and the Trade Remedies page at
https://www.cbp.gov/trade/programs-administration/trade-remedies.
The holding set forth above applies only to the specific factual situation and merchandise description as
identified in the ruling request. This position is clearly set forth in Title 19, Code of Federal Regulations
(CFR), Section 177.9(b)(1). This section states that a ruling letter is issued on the assumption that all of the
information furnished in the ruling letter, whether directly, by reference, or by implication, is accurate and
complete in every material respect. In the event that the facts are modified in any way, or if the goods do not
conform to these facts at time of importation, you should bring this to the attention of U.S. Customs and
Border Protection (CBP) and submit a request for a new ruling in accordance with 19 CFR 177.2.
Additionally, we note that the material facts described in the foregoing ruling may be subject to periodic
verification by CBP.
This ruling is being issued under the provisions of Part 177 of the Customs and Border Protection
Regulations (19 C.F.R. 177).
A copy of the ruling or the control number indicated above should be provided with the entry documents
filed at the time this merchandise is imported. If you have any questions regarding the ruling, please contact
National Import Specialist Arthur Purcell at [email protected].
Sincerely,
(for)
James P. Forkan
Director
National Commodity Specialist Division