CLA-2 CO:R:C:F 087315 RFC

Mr. George R. Tuttle
Three Embarcadero Center
Suite 1160
San Francisco, CA 94111

RE: Reconsideration of Headquarters Ruling Letter (HRL) 085914; photoresist; resist; emulsion; solution; solvent; photographic; photosensitive

Dear Mr. Tuttle:

This letter is in response to your letter of May 3, 1990, on behalf of Tokyo Ogawa Co. Ltd. and Ohka America, Inc., requesting a reconsideration of HRL 085914, dated January 29, 1990. HRL 085914 concerns the tariff classification under the Harmonized Tariff Schedule of the United States Annotated (HTSUSA) of photoresist.

FACTS:

The products under consideration are positive photoresist and negative photoresist. There are three separately identified products:

OMR-83 Negative Photoresist

OFPR-800 Positive Photoresist

TSMR-8800 Positive Photoresist

In its September 20, 1989, request for classification rulings, the importer describes OMR-83 negative photoresist as consisting of "cyclized rubber and sensitive...dissolved in xylene at a fixed ratio." In this same request, OFPR-800 positive photoresist and TSMR-8800 positive photoresist are described as consisting of "Novolak resin and sensitizer...dissolved in EGA (ethylene glycol monoethyl ether acetate) at a fixed ratio."

In its October 1990, request for reconsideration, the importer describes OMR-83 negative photoresist as a "mixture of xylene, cyclized rubber binder and bisazide photosensitive compound." In this same request, OFPR-800 positive photoresist and TSMR-8800 positive photoresist are described as "a mixture of Ethylene Glycol Monoethyl Ester Acetate (EGA), novolak resin binder and diazo quinone photosensitive compound.

Photoresist is a light-sensitive material that is used in the manufacture of semiconductor chips or integrated circuits. During the manufacturing process, photoresist is applied to a wafer of silicon that is first insulated with an oxide film. Through further processing, the wafer is eventually turned into a semiconductor chip or integrated circuit.

A proper understanding of photoresist cannot be had without knowledge of what constitutes a "solvent" and "solution" and "emulsion." A "solution" is a substance capable of dissolving another substance (solute) to form a uniformly dispersed mixture ("solution") at the molecular or ionic size level. See Hawley's Condensed Chemical Dictionary 1080 (1987). On the other hand, an "emulsion" is a stable mixture of two or more immiscible liquids held in suspension by small percentages of substances. Id. at 460.

ISSUES

(1) What is the proper tariff classification under the HTSUSA of positive photoresist?

(2) What is the proper tariff classification under the HTSUSA of negative photoresist?

LAW AND ANALYSIS:

Merchandise imported into the United States is classified under the Harmonized Tariff Schedule of the United States Annotated (HTSUSA). The tariff classification of merchandise under the HTSUSA is governed by the principles set forth in the General Rules of Interpretation (GRIs) and, in the absence of special language or context which otherwise requires, by the Additional U.S. Rules of Interpretation. The GRIs and the Additional U.S. Rules of Interpretation are part of the HTSUSA and are to be considered statutory provisions of law for all purposes. See Sections 1204(a) and 1204(c) of the Omnibus Trade and Competitiveness Act of 1988 (19 U.S.C. 1204(a) and 1204(c)).

GRI 1 requires that classification be determined first according to the terms of the headings of the tariff schedule (i.e., (1) merchandise is to be classified under the 4-digit heading that most specifically describes the merchandise; (2) only 4-digit headings are comparable; and (3) merchandise must first satisfy the provisions of a 4-digit heading before consideration is given to classification under a subheading within this 4-digit heading) and any relative section or chapter notes and, provided such headings or notes do not otherwise require, then according to the other GRIs.

GRI 6 prescribes that, for legal purposes, GRIs 1 to 5 shall govern, mutatis mutandis, classification at subheading levels within the same heading. Therefore, merchandise is to be classified at equal subheading levels (i.e., at the same digit level) within the same 4-digit heading under the subheading that most specifically describes or identifies the merchandise.

The Explanatory Notes to the Harmonized Commodity Description and Coding System (hereinafter "Harmonized System") represent the official interpretation of the Customs Cooperation Council on the scope of each heading. See H.R. Conf. Rep. No. 100-576, 100th Cong., 2d Sess. 549 (1988); 23 Customs Bulletin No. 36, 3 (T.D. 89-90, September 6, 1989), 59 F.R. 35127 (August 23, 1989). Although not binding on the contracting parties to the Harmonized System Convention or considered to be dispositive in the interpretation of the Harmonized System, the Explanatory Notes should be consulted on the proper scope of the Harmonized System. Id.

A review of the schedule reveals that the products may be classified in chapter 37. This chapter covers "photographic or cinematographic goods." Of special significance to the instant classification analysis is note 2 to chapter 37. This note states that:

In this chapter the word "photographic" relates to a process which permits the formation of visible images directly or indirectly by the action of light or other forms of radiation on sensitive forms of radiation on sensitive surfaces.

See Note 2 to Chapter 37 to the HTSUSA.

As indicated above, photoresist is a light-sensitive material. Therefore, classification in chapter 37 would be appropriate under a heading providing for such a "photographic" material.

In chapter 37, heading 3707 provides for, among other things, "chemical preparations for photographic uses (other than varnishes, glues, adhesives and similar preparations)." Photoresist is a chemical preparation and, as discussed above, it meets the definition of "photographic" as set forth above in note 2 to chapter 37. Therefore, photoresist is most specifically described by the article description "chemical preparations for photographic uses" as set forth in heading 3707. Thus, pursuant to GRI 1, photoresist is properly classified under this heading.

Photoresist has been determined to be properly classified under heading 3707. Consideration now must be given to the proper subheading under heading 3707 in which to classify photoresist. In heading 3707, the competing 8-digit subheadings are 3707.10.00 which provides for "sensitized emulsions" and 3707.90.30 which provides for "other chemical preparations for photographic uses" (i.e., chemical preparations not eo nomine or specifically provided for in heading 3707 but which are nonetheless properly classified under this heading). Therefore, pursuant to GRIs 1 and 6, if photoresist is not determined to be properly classified as "sensitized emulsions" under subheading 3707.10.00 then it must consequently be classified as "other chemical preparations for photographic uses" under subheading 3703.90.30.

In order to determine whether photoresist is properly classified as "sensitized emulsions," one must quite logically attempt to ascertain what constitutes a "sensitized emulsion" for purposes of classification under subheading 3707.10.00. Guidance concerning this article description may be found in the Explanatory Notes to heading 3707. These notes, however, refer the reader to the general notes to the Explanatory Notes to chapter 37 concerning the term "emulsion" (i.e., "Emulsions (see the General Explanatory Notes to Chapter [37]").

The general notes to the Explanatory Notes to chapter 37 state, in part, that:

The photographic plates, film, paper, paperboard and textiles of Chapter 37 are those with one or more layers of any emulsion sensitive to light or other forms of radiation (e.g., infra-red, ultra-violent, X-ray, gamma-ray or other radioactivity), whether for reproduction in monochrome or colour. Certain plates are, however, not coated with an emulsion but consist wholly or essentially of photosensitive plastics which may be affixed to a support.

The most common emulsions are based on silver halides (silver bromide, silver bromide-iodide, etc.) or on salts of other precious metals, but certain other materials may be used, e.g., potassium ferricyanide or other iron compounds for blue-prints, potassium or ammonium dichromate for photomechanical engraving, diazonium salts for diazo emulsions, etc.

See General Notes to the Explanatory Notes to Chapter 37 to the Harmonized Commodity Description and Coding System.

A review of the above-listed general notes shows that the discussion of "emulsions" is strictly to be construed as this material is related to or as applied to "photographic plates, film, paper, paperboard and textiles of Chapter 37." Therefore, for these notes to be relevant to the instant classification analysis, it must be shown that the objects to which photoresist is applied (i.e., an oxide film on a wafer of silicon) is to be considered the same objects (in both composition and use) as discussed in this note (i.e., "photographic plates, film, paper, paperboard and textiles of Chapter 37").

The oxide film on a wafer of silicon on which photoresist is applied as part of the manufacturing process of semiconductor chips or integrated circuits is certainly not to be considered "paper, paperboard and textiles of Chapter 37." For the above notes to have any relevance to the instant classification analysis, then, it must be shown that the oxide film on a wafer of silicon is a "photographic plate and film" as contemplated by these notes.

A review of chapter 37 reveals that heading 3701 provides for, among other things, "photographic plates and film in the flat, sensitized, unexposed, of any material other than paper, paperboard or textiles." The Explanatory Notes to this heading may provide guidance as to what constitutes "photographic plates and film" as discussed in the general notes to the Explanatory Notes to chapter 37. The Explanatory Notes to heading 3701 state, in pertinent part, that:

This heading covers...photographic plates and film in the flat, of any material other than paper, paperboard or textiles. Such plates and film in the flat (i.e., not in rolls), including film up in disc form, are unexposed and are generally coated with a sensitized photographic emulsion. These may be made of any material except paper (e.g., paper "plates" used to produce negatives), paperboard or textiles (heading 37.03). The materials commonly used are glass and cellulose acetate, polyethylene terphthalate or other plastics (for film packs or cut films), and metal or stone (for photomechanical processes). Certain plates, which when exposed and processed will be used for printing, are not coated with an emulsion but consist wholly or essentially of photosensitive plastics. They may be affixed to a support of metal or other material. Some of these plates must have their degree of sensitivity enhanced prior to exposure.

These goods are put to many uses such as:

(1) Plates, cut film and film packs for amateur or professional use.

(2) X-ray plates and flat film including those for dental radiography. These goods are generally sensitized on both sides.

(3) Photomechanical process plates of the type used for photoengraving, photolithography, etc.

(4) Special plates and film for use in thermography, microphotography, photomicrography, astronomy, cosmic ray photography, aerial photography, etc.

See Explanatory Notes to Heading 3701 to the Harmonized Commodity Description and Coding System.

A review of these notes find no indication (either explicit or implicit) that the term "emulsion" as found therein covers photoresist. All of the "photographic plates and film" discussed in these notes are for use in creating visible images for viewing (e.g., photographic pictures) or for printing (e.g., printing plates). On the other hand, the oxide film on a silicon wafer on which photoresist is applied is used to produce a semiconductor chip or integrated circuit used for the distinct purpose of conducting electricity. Clearly, then, the terminology "photographic plates and film" as set forth in the general notes to the Explanatory Notes to chapter 37 does not cover the oxide film on a silicon wafer used in the manufacture of semiconductor chips or integrated circuits. Accordingly, the discussion of the term "emulsion" as set forth in these same notes has no application or relevance to photoresist. Therefore, the general notes to the Explanatory Notes to chapter 37 are inapplicable and irrelevant to the instant classification analysis of photoresist.

Photoresist has been found not to be an "emulsion" as this term is used and discussed in the Explanatory Notes. Therefore, consideration must now be given to other possible sources dealing with the issue of whether photoresist is considered chemically, commercially or commonly to be an "emulsion."

In support of its position that photoresist is an emulsion, the importer submits as exhibits various sections and articles (and parts thereof) from various publications. In some places in this material, the term "emulsion" is used in a loose manner in junction with the term "photoresist." Of special significance to the instant classification analysis, however, is that in a chapter from a book entitled Photoresists: Materials and Process the term "emulsion" is never used either in regard to photoresists or otherwise. In fact, in this chapter, photoresist is described as a "solution." See Exhibit 6 to October 1990 Request for Reconsideration, p. 13 of chapter 1 ("The second phase of the dichromate era in the evolution of photoresists technology was the introduction of synthetic photosensitive polymers...These solutions had some of the expected advantages over their natural counter parts with regard to consistency and shelf life [emphasis added].").

In product literature submitted by the importer at a June 15, 1990 conference, in various places where photoresist products are discussed, the term "emulsion" is never used. In a section in this product literature entitled "Printed Circuit Board Photoresists and Specialty Circuits," however, a photoresist product is described as a "solvent" (i.e., "In 1962, we developed TPR, a solvent photoresist that started a whole new line for us, and since then we have provided industry [sic] with an extensive line of chemical-resistant, non chrome-water soluble photoresists [emphasis added].").

A review of the scientific literature clearly shows that liquid photoresist is chemically and commercially and commonly considered and understood to be a "solution" rather than an "emulsion." See 17 Encyclopedia of Chemical Technology 681, 705 (1980) ("Photoresist polymer compositions must fulfill a number of physical-property-dependent requirements under practical working conditions. The polymers must form homogeneous solutions in ecologically acceptable solvents...[and]...be characterized by good solution stability for storage...[Moreover,] [l]iquid-resist coverage depends on the concentration of solids dissolved in the resist solvent [emphasis added]"); Printed Circuits Handbook 11.8 (1982) (A characteristic of liquid photoresist is that it is solvent based.).

In various dictionary definitions, the term "photoresist" is neither defined as nor referred to as an "emulsion." See The Illustrated Dictionary of Microcomputers 287 (1990) (Photoresist is a "substance that resists the erosion properties of an etchant when exposed to intense light...[and]..is usually an organic material that polymerizes on exposure to light...."); Webster's Ninth New Collegiate Dictionary 886 (1989) (Photoresist is "a photosensitive resist...."); The Random House Dictionary of the English Language 1459 (1987) (Photoresist is "a photosensitive liquid polymer...."); Vol. III The Compact Edition of the Oxford English Dictionary 767 (1987) (Photoresist is "[a] photosensitive resist which when exposed to (usu. ultraviolet) light loses either its resistance or its susceptibility to attach an etchant or solvent."); Dictionary of Information Technology 257 (1986) (Photoresist: "Pertaining to photosensitive materials that react to light by hardening."); Computer Dictionary 348 (1985) (Photoresist is a "liquid that, when spread in a thin film, and dried, quickly hardens into a tough plastic substance when struck by ultraviolet light."); Barnes & Noble Thesaurus of Computer Science 138 (1984) (Photoresist is "a material which is photosensitive and resistant to an etching material.").

In light of the above, one can only conclude that photoresist is not properly classified as "sensitized emulsions" under subheading 3707.10.00. Consequently, as discussed above and pursuant to GRIs 1 and 6, photoresist can only be classified under subheading 3707.90.30 as "other chemical preparations for photographic uses."

Finally, in a June 12, 1991, submission, the importer cites a statistically annotated tariff-rate line as "authority" for its argument that photoresist is an emulsion. This is entirely incorrect. First, tariff-rate lines are annotated by the addition of 2-digit statistical suffixes to 8-digit subheadings merely to permit the collection of trade data on narrower classes of merchandise. See Committee on Ways and Means of the U.S. House of Representatives, Overview and Compilation of U.S. Trade Statutes (WMPC:101-14) 5 (1989). These statistical "break outs" are not part of the legal text of the HTSUSA. See Sections 1204(a) and 1204(c) of the Omnibus Trade and Competitiveness Act of 1988 (19 U.S.C. 1204(a) and 1204(c)). Therefore, a statistical "break out" located in one chapter most certainly cannot act as authority for the classification of merchandise classified in a completely different chapter in the HTSUSA. Second, as has been clearly shown above, photoresist is not chemically, commercially or commonly considered or understood to be an "emulsion."

HOLDING:

All of the above-described products are properly classified under subheading 3707.90.30, HTSUSA, which provides for, among other things, chemical preparations for photographic uses (other than varnishes, glues, adhesives and similar preparations), other, chemical preparations for photographic uses. The general rate of duty is 8.5 percent ad valorem.

In view of the above, HRL 085914 is hereby affirmed.

Sincerely,

John Durant, Director
Commercial Rulings Division